Manufacture : Tegal

Model : 901e

Wafer Size : 6"

Application : Poly

Equipment Description : Nitride Etcher

Operational Manuals, electronics Schematics & Spare Parts Drawing included

Fully Refurbished

Sub Systems : 

1.RF Generator (ACG 10)
2.Pump (D30AC)
3.Monitor / Keyboard (VT420)
4.Temp. Controller (1 ea)
5.Chart Recorder

Spec :

-Main system ; 44"w x 42"D x 26"H
               500 lbs
               208 VAC, 30 AMmp, 1 phase 
-RF Generator ; 20"w x 16"D x 10"H
                104 lbs
                208 VAC
-CRT & Keyboard
-Chart Recorder ; 9"w x 12"D x 5"H
                  11 lbs
                  115 VAC
-Temp. Controller ; 24"W x 20"D x 30"H
                    300 lbs
                    208 VAC, 1 phase
-Gas ; Gas1,2,3,4 & Clean O2