Manufacture : Tegal

Model : 803

Serial Number : 8030302

Wafer Size : 4"

Date Manufactured : 1985

Application : Poly Etch

Power Code : 208 VAC, 1 Phase, 40 Amp

Operational Manuals, electronics Schematics included

AS-IS Operational Part machine

Sub Systems : 

1.RF Generator (1 ea)
2.Temperature controller (2 ea)

Spec :

-Main system (45"w x 30"D x 24"H) * 208 VAC, 1 Phase, 40 Amp
-RF Generator (RF-1, ENI) ; (17"w x 23"D x 27"H) * 208 VAC, 3 Phase
-Temperature controller (2 ea) ; (17"w x 18"D x 29"H) * 115 VAC, 1 Phase, 15 Amp
-weight : 341 lbs (Main)
          165 lbs (RF Generator)
           93 lbs (Temp. Controller)
-Pump is not available
-No Missing Part
-Gas ; O2, CHF3, C2F6, He