NOVELLUS System Configurations

Model: CONCEPT ONE
S/N; 96-48-2196
VINTAGE 1996

Wafer Size Range: 6" 
Process: PECVD System, Nitride 

System Power: 208VAC, 3Phase, 5Wires, 400AMP, 50/60Hz 

Standard Gas Panel
Silane,
Phosphine,
Diborane,
CH4,
Ammonia,
Freon119,
Oxygen,
N2O, 
And N2.
W/AC Box, 
2 Ebara A70 Vacuum pump.